LineWorks SDC – Statistical Defect Control

Effective statistical methods to detect defects on wafers

This add-on module for LineWorks SPACE provides SDC (Statistical Defect Control), an integrated fab-wide solution for detecting defects on (silicon) wafers.

Your benefits:

• Save time and money by detecting and addressing killer defects with multiple Statistical Process Control (SPC) strategies
• High defect visibility through automated detection
• Detect defects faster with recurring defect and root cause analyses