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Modeling Concepts to Sustain the Growing Complexity in Recipe Management Systems

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As the manufacturing processes and the equipment become more complex, the number and the complexity of the recipes grows as well.
Recipe management systems face the challenge of modelling and managing a growing number of physical recipes in a centralized manner for the complete fab.
The purpose of this paper is to introduce a set of techniques regarding data modelling and management in a recipe management system, in order to reduce the duplication of data and the risk of human errors in recipe setup for new technologies, products or production equipment instances.

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