LineWorks SDC

Solution for detecting defects
Effective statistical methods to detect defects on wafers: This add-on module for LineWorks SPACE provides SDC (Statistical Defect Control), an integrated fab-wide solution for detecting defects on (silicon) wafers.
LineWorks SDC closes the gap between statistical process control and analyses of spatial signatures. With SDC multiple SPC strategies are available to control critical defect classes with normalized defect density (NDD) charts. Trend and pareto analyses, control limit calculations, tool matching, corrective actions and advanced SPC methods such as moving median are leveraged to take measures against killer defects. The integrated platform synchronizes an embedded wafer map with the selected sample in the SPC chart. Operators and engineers of wafer makers, hard disc manufacturers, and chip makers can re-use their SPACE expertise and need less time for recurring defect and root cause analyses.

Key Features


Highlights of Release 1.0.1


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