EN

LineWorks SDC

Solution for detecting defects
Effective statistical methods to detect defects on wafers: This add-on module for LineWorks SPACE provides SDC (Statistical Defect Control), an integrated fab-wide solution for detecting defects on (silicon) wafers.
LineWorks SDC closes the gap between statistical process control and analyses of spatial signatures. With SDC multiple SPC strategies are available to control critical defect classes with normalized defect density (NDD) charts. Trend and pareto analyses, control limit calculations, tool matching, corrective actions and advanced SPC methods such as moving median are leveraged to take measures against killer defects. The integrated platform synchronizes an embedded wafer map with the selected sample in the SPC chart. Operators and engineers of wafer makers, hard disc manufacturers, and chip makers can re-use their SPACE expertise and need less time for recurring defect and root cause analyses.

Key Features

Benefits

Highlights of Release 1.0.1

Downloads

Have we piqued your interest?

Then contact us!






    The fields marked with an asterisk (*) are mandatory.

    You can use this contact form to contact us. We will use your personal data only for the purpose of processing your query. Your contact request will be processed centrally within the camLine Group to ensure that your inquiry can be responded to as quickly and effectively as possible. More detailed information concerning the collection and processing of data in connection with this contact form is available in our Privacy Policy.

    Attention!

    Attention:
    From Saturday, October 16, 2021, 9 am CEST to approximately Sunday, October 17, 2021, 9 am CEST the camLine Support Portal will not be available. In urgent cases, please use your dedicated hotline number or +49 8137 6059 989.